Silicon pezoresitive-bridge pressure transducer (SPPT) is very popular in medical, industrial, environmental, and automotive pressure sensor application. The general architecture of SPPT uses a thin micromachined silicon diaphragm incorporates a implanted piezoresitive Wheatson-bridge strain-gauge. The transducer design allows only a small diaphragm deflection sin it has limited elasticity, and this produces only a very [...]
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